MKS Instruments offers several analytical tools for emissions and process monitoring applications based on IR spectroscopy.
Gas emissions monitoring is normally required at emission sources such as power plant stacks and chemical manufacturing facilities. Accurate monitoring data is a critical part of regulatory compliance and environmental protection programs designed to control and regulate airborne pollutants such as carbon monoxide, nitrogen oxide, sulphur dioxide, and ozone, as well as greenhouse gases such as methane and carbon dioxide. MKS'
MultiGas™ 2030 system is a high-speed, high-resolution FTIR-based gas analyzer designed to simultaneously monitor more than 30 emission gases in under a second.
There is a growing demand in the safety and security industries for rapid and reliable detection of chemical agents and toxic industrial chemicals. MKS Instruments' FTIR-based
AIRGARD® system can detect parts per billion (ppb) levels of most chemical warfare agents (CWA) and toxic industrial compounds within 20 seconds. It is the industry standard, a fixed monitoring of CWAs in critical infrastructure buildings.
Semiconductor chemical-vapor deposition process chambers must be periodically cleaned to remove deposited build-up on the chamber walls and internal components. Optimal cleaning times for different processes depend on a complex relationship between variables such as the thickness of the build-up, the interior temperature of the chamber components, deposition/sputter ratios, and the chemical composition of the materials to be removed. MKS' Process Sense™ endpoint sensor monitors the effluent from the chamber cleaning process in real-time using an NDIR method. For example,
Process Sense™ monitors are used with fluorine-based chamber cleaning processes to monitor the by-product silicon tetrafluoride (SiF
4) from chambers employed for silicon-based deposition processes (including poly silicon, silicon dioxide, and silicon nitride). The sensor reports the SiF
4 level remaining in the effluent from the chamber in real-time, allowing the user to rapidly detect the endpoint of the cleaning process and avoid over-etching of the chamber components that might lead to damage or other maintenance issues.
Knowledge of the heating value (BTU content) of a fuel is an important parameter for optimal control of processes such as power generation, petrochemical manufacturing, and flare control. Traditionally, gas chromatography (GC) has been the analytical technique most commonly used to determine the heating value of fuels. However, GC analyses are slow (updates require minutes) and GC instrumentation typically requires significant maintenance. MKS'
Precisive® Gas Analyzer is the industry's first all-optical analyzer that performs quantitative speciation of hydrocarbon gases. Using patented TFS™ analyzer technology, the Precisive analyzer is a simple and rugged NDIR instrument that provides high accuracy BTU measurements in often dirty and hazardous industrial environments.