極紫外光源 EUV Light Source

極紫外光

TEUS - LPP EUV light source with high brightness and low debris

極紫外光

TEUS - LPP EUV 光源，高亮度低碎屑
LPP EUV 光源基於快速旋轉的液態金屬靶。採用傳統碎片減緩技術的新型 LPP 靶為清潔光子 EUV 源提供了最終解決方案。 ...

極紫外光源, TEUS S-100 EUV LIGHT SOURCE

TEUS S-100 EUV LIGHT SOURCE

極紫外光源

TEUS S-100 極紫外光源

極紫外光源, TEUS S-200 EUV LIGHT SOURCE

TEUS S-200 EUV LIGHT SOURCE

極紫外光源

TEUS S-200 極紫外光源

極紫外光源, TEUS S-400 EUV LIGHT SOURCE

TEUS S-400 EUV LIGHT SOURCE

極紫外光源

TEUS S-400 極紫外光源